General Atomics Energy Products (GAEP) announced today that it has developed and delivered prototypes of a 4-kilohertz repetition rate, water-cooled, 20-kilowatt average power, capacitor charging high voltage power supply for a semiconductor lithography application. The compact 3.0 kV power supply provides excellent precision and pulse-to-pulse repeatability, rapid response to programmed changes in output voltage, and many other features required by this demanding application.

This design represents a number of “firsts” for the company:

• 20 kW average power in a single rack-mounted enclosure
• 4 kHz pulse repetition rate capability
• 0.2% pulse to pulse repeatability
• water-cooling
   

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The development was funded partially by GAEP internal R&D funds, and partially by an OEM process equipment manufacturer. GAEP has also supplied prototype low-inductance plastic-case capacitors for the same application.

GAEP is a leading supplier of high voltage, high power AC/DC switching power supplies, power conditioning and pulse power systems used in pulse power research facilities, lasers, accelerators, and a variety of other applications. GAEP is part of General Atomics Electronic Systems Inc., an affiliate company of General Atomics. The Power Systems product line, formerly part of Maxwell Technologies, Inc., was purchased by General Atomics in March 2000. General Atomics Electronic Systems Inc. also designs and manufactures high voltage capacitors, radiation monitoring systems, and terminal automation products.

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